{"id":67227,"date":"2024-08-28T16:07:06","date_gmt":"2024-08-28T08:07:06","guid":{"rendered":"https:\/\/naipnews.naipo.com\/?p=67227"},"modified":"2026-07-01T16:26:35","modified_gmt":"2026-07-01T08:26:35","slug":"%e9%94%97%e7%9a%84%e7%8e%af%e4%bf%9d%e5%9b%9e%e6%94%b6%e5%8f%8a%e5%85%88%e8%bf%9b%e5%8d%8a%e5%af%bc%e4%bd%93%e5%88%b6%e7%a8%8b%e5%ba%94%e7%94%a8","status":"publish","type":"post","link":"https:\/\/naipnews.naipo.com\/zh-hans\/67227\/","title":{"rendered":"\u9517\u7684\u73af\u4fdd\u56de\u6536\u53ca\u5148\u8fdb\u534a\u5bfc\u4f53\u5236\u7a0b\u5e94\u7528"},"content":{"rendered":"
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\u6444\u5f71\uff1a\u5317\u7f8e\u667a\u6743\uff0f\u5510\u94ed\u4f1f<\/figcaption><\/figure>\n

\u9517\u662f\u4e00\u79cd\u534a\u5bfc\u4f53\u6750\u8d28\uff0c\u7535\u6027\u8d28\u4ecb\u4e8e\u4e00\u822c\u91d1\u5c5e\u548c\u7edd\u7f18\u4f53\u4e4b\u95f4\uff0c\u53ef\u7528\u4e8e\u5236\u9020\u6676\u4f53\u7ba1\u548c\u5404\u79cd\u7535\u5b50\u88c5\u7f6e\uff0c\u56e0\u6b64\u9517\u7684\u7279\u6027\u53ef\u5e94\u7528\u4e8e\u534a\u5bfc\u4f53\u3001\u6838\u7269\u7406\u63a2\u6d4b\u3001\u5149\u7ea4\u901a\u8baf\u3001\u7ea2\u5916\u5149\u5b66\u3001\u519b\u7528\u591c\u89c6\u955c\u3001\u592a\u9633\u80fd\u7535\u6c60\u3001\u5316\u5b66\u50ac\u5316\u5242\u3001\u751f\u7269\u533b\u5b66\u7b49\u7ec8\u7aef\u5e94\u7528\u3002\u9517\u4e5f\u662f\u91cd\u8981\u7684\u534a\u5bfc\u4f53\u6750\u6599\uff0c\u76ee\u524d\u5df2\u7ecf\u88ab\u7528\u5728\u534a\u5bfc\u4f53\u5148\u8fdb\u5236\u7a0b\u73af\u7ed5\u5f0f\u95f8\u6781(Gate all around: GAA)\u7684\u5236\u4f5c\u4e2d\uff0c\u4ee5\u7845\u9517\u78ca\u6676\u7684\u65b9\u5f0f\u5236\u6210\u73af\u7ed5\u5f0f\u95f8\u6781\u6676\u4f53\u7ba1\u3002\u672c\u6587\u5173\u6ce8\u9517\u5728\u8fd9\u65b9\u9762\u76f8\u5173\u5e94\u7528\u53ca\u5176\u73af\u4fdd\u56de\u6536\u7eff\u8272\u6280\u672f\u7684\u56fd\u9645\u95f4\u91cd\u8981\u4e13\u5229\uff0c\u540c\u65f6\u4ece3\u5948\u7c73\u8fc8\u54112\u5948\u7c73\u5148\u8fdb\u534a\u5bfc\u4f53\u5236\u9020\u6280\u672f\u4e2d\uff0c\u9517\u5728\u5176\u4e2d\u4ea6\u626e\u6f14\u5173\u952e\u89d2\u8272\u3002<\/p><\/blockquote>\n

\u7535\u5b50\u5e9f\u5f03\u7269\u56de\u6536\u9517<\/span><\/p>\n

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\u8fd9\u79cd\u521b\u65b0\u4e14\u73af\u4fdd\u7684\u65b9\u6cd5\uff0c\u7528\u4e8e\u4ece\u7535\u5b50\u5e9f\u6599\u4e2d\u63d0\u53d6\u9517\u3002\u4f7f\u7528\u5982\u918b\u9178\u7b49\u6709\u673a\u9178\u9ad8\u6548\u5730\u4ece\u7814\u78e8\u540e\u7684\u7535\u5b50\u7ec4\u4ef6\u4e2d\u6d78\u51fa\u9517\uff0c\u5e76\u9488\u5bf9\u6700\u5927\u56de\u6536\u7387\u4f18\u5316\u4e86\u5177\u4f53\u53c2\u6570\u3002<\/p>\n

\u5236\u7a0b\u5e9f\u6c14\u56de\u6536\u9517\uff08\u73af\u5883\u8403\u53d6\uff09<\/span><\/p>\n

\u65e5\u672c\u4e13\u5229JP2022032523A\u63ed\u793a\u4e86\u4e00\u79cd\u4ece\u5149\u7ea4\u5236\u9020\u8fc7\u7a0b\u4e2d\u4ea7\u751f\u7684\u5e9f\u6c14\u4e2d\u56de\u6536\u9517\u7684\u6210\u672c\u6548\u76ca\u65b9\u6cd5[2]<\/a>\uff0c\u4f7f\u7528\u6e7f\u5f0f\u6216\u5e72\u5f0f\u96c6\u5c18\u5668\u6536\u96c6\u542b\u9517\u7c89\u5c18\uff0c\u5c06\u9517\u63d0\u53d6\u5230\u6db2\u4f53\u4e2d\uff0c\u5e76\u6c89\u6dc0\u9517\u5316\u5408\u7269\uff0c\u63d0\u9ad8\u4e86\u56de\u6536\u6548\u7387\uff0c\u540c\u65f6\u964d\u4f4e\u6210\u672c\u548c\u73af\u5883\u5f71\u54cd\u3002\u5176\u56de\u6536\u8fc7\u7a0b\u5305\u62ec(1)\u5206\u79bb\u542b\u9517\u7c89\u5c18\uff1a\u4f7f\u7528\u6e7f\u5f0f\u6216\u5e72\u5f0f\u96c6\u5c18\u5668\u4ece\u5e9f\u6c14\u4e2d\u6536\u96c6\u542b\u9517\u7c89\u5c18\uff1b(2)\u5c06\u9517\u63d0\u53d6\u5230\u6db2\u4f53\u4e2d\uff1b(3)\u5c06\u9517\u63d0\u53d6\u6db2\u4e0e\u56fa\u4f53\u6b8b\u6e23\u5206\u79bb\uff1b(4)\u6c89\u6dc0\u542b\u9517\u5316\u5408\u7269\uff1b(5)\u5206\u79bb\u6c89\u6dc0\u7684\u9517\u5316\u5408\u7269\u3002\u6b64\u5916\uff0c\u8fd8\u53ef\u901a\u8fc7\u5206\u7ea7\u5904\u7406\u5c06\u7c97\u7c92\u548c\u7ec6\u7c92\u7684\u6c89\u6dc0\u7269\u5206\u5f00\uff0c\u5176\u4e2d\u53ef\u4ee5\u5c06\u7ec6\u7c92\u5faa\u73af\u56de\u8fc7\u7a0b\u4e2d\u4ee5\u4f5c\u4e3a\u6676\u79cd\uff0c\u4fc3\u8fdb\u6c89\u6dc0\u7684\u9ad8\u6548\u8fdb\u884c\u3002<\/p>\n

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\u63ba\u9517\u5230\u7845\u5948\u7c73\u7ebf\u5f62\u6210\u7845\u9517(SiGe)\u4fe1\u9053\u63d0\u5347\u96c6\u6210\u7535\u8def\u6027\u80fd<\/span><\/p>\n

\u7f8e\u56fd\u4e13\u5229US20210408285A1\u63d0\u4f9b\u4e00\u79cd\u5229\u7528\u9517\u63ba\u6742\u7684\u5948\u7c73\u7ebf\/\u5948\u7c73\u5e26\u4fe1\u9053\u7ed3\u6784\u7684\u73af\u7ed5\u5f0f\u6805\u6781 (Gate-all-around, GAA)\u96c6\u6210\u7535\u8def\u7ed3\u6784[3]<\/a>\u3002\u8fd9\u4e9b\u7ed3\u6784\u65e8\u5728\u901a\u8fc7\u63ba\u9517\u5230\u7845\u5948\u7c73\u7ebf\u4e2d\u5f62\u6210\u7845\u9517\u901a\u9053\uff0c\u6765\u63d0\u5347\u96c6\u6210\u7535\u8def\u7684\u6027\u80fd\uff0c\u7279\u522b\u662f\u63d0\u9ad8\u6676\u4f53\u7ba1\u7684\u8fc1\u79fb\u7387\u548c\u6548\u7387\uff0c\u5176\u5236\u7a0b\u4e0e\u73b0\u6709\u7684\u534a\u5bfc\u4f53\u5236\u9020\u517c\u5bb9\u3002<\/p>\n

\u8be5\u4e13\u5229\u6240\u4e3b\u5f20\u7684\u96c6\u6210\u7535\u8def\u7ed3\u6784\u5305\u62ec\u5728\u57fa\u677f\u4e0a\u65b9\u5782\u76f4\u6392\u5217\u7684\u5948\u7c73\u7ebf\u3002\u6bcf\u6839\u5948\u7c73\u7ebf\u5728\u5176\u4fa7\u5411\u4e2d\u70b9\u5904\u7684\u9517\u6d53\u5ea6\u6bd4\u4fa7\u5411\u4e24\u7aef\u66f4\u9ad8\u3002\u6bcf\u6839\u5948\u7c73\u7ebf\u7684\u9517\u6d53\u5ea6\u4ece\u4fa7\u5411\u4e2d\u70b9(lateral midpoint)\u5904\u7684\u7845\u9517\u6d53\u5ea6\uff08\u7845\u6d53\u5ea6\uff1a50%\uff0c\u9517\u6d53\u5ea6\uff1a50%\uff09\u5230\u4e24\u7aef\u7684\u7845\u9517\u6d53\u5ea6\uff08\u7845\u6d53\u5ea6\uff1a90%\uff0c\u9517\u6d53\u5ea6\uff1a10%\uff09\u9010\u6e10\u9012\u51cf\u3002\u6b64\u5916\uff0c\u8be5\u4e13\u5229\u6240\u63ed\u793a\u7684\u534a\u5bfc\u4f53\u7ed3\u6784\uff0c\u4ea6\u5305\u62ec\u5782\u76f4\u6392\u5217\u7684\u5948\u7c73\u7ebf\u4fa7\u5411\u4e24\u7aef\u653e\u7f6e\u5982\u63ba\u787c\u7845\u9517\u7684\u78ca\u6676\u6e90\u6781\u6216\u6c72\u6781\u7ed3\u6784\u3002\u6b64\u7ed3\u6784\u5bf9\u5948\u7c73\u7ebf\u65bd\u52a0\u5355\u8f74\u538b\u7f29\u5e94\u53d8\uff0c\u63d0\u9ad8pMOS\u6676\u4f53\u7ba1\u4e2d\u7684\u7535\u6d1e\u8fc1\u79fb\u7387\uff0c\u63d0\u5347\u5f00\u5173\u901f\u5ea6\u548c\u6548\u7387\u3002\u6240\u8c13\u7684\u78ca\u6676\u6e90\u6781\u6216\u6c72\u6781\u7ed3\u6784\u5728\u672c\u4e13\u5229\u7533\u8bf7\u6848\u4e2d\u662f\u6307\u751f\u957f\u5728\u5948\u7c73\u7ebf\u7684\u4e24\u4fa7\uff0c\u5373\u6676\u4f53\u7ba1\u7684\u6e90\u6781\u548c\u6c72\u6781\u533a\u57df\u7684\u6676\u4f53\u5c42\u3002\u4e13\u5229\u7ed3\u6784\u53ef\u7528\u4e8e\u5236\u9020\u903b\u8f91\u3001\u6a21\u62df\u548c\u9ad8\u538b\u8bbe\u5907\u3002<\/p>\n

\u8be5\u4e13\u5229\u6240\u4e3b\u5f20\u7684\u5236\u9020\u65b9\u6cd5\u5305\u62ec\u5728\u91ca\u653e\u5f0f\u8680\u523b(release etch)\u540e\uff0c\u4f4e\u6e29\u9517\u5305\u8986\u5c42\u88ab\u78ca\u6676\u6c89\u79ef\u5230\u7845\u5948\u7c73\u5728\u7ebf\u3002\u9ad8\u6e29\u9000\u706b\u8fc7\u7a0b\u4f7f\u9517\u6269\u6563\u5230\u7845\u4e2d\uff0c\u5f62\u6210\u7845\u9517\u5948\u7c73\u7ebf\u901a\u9053\u3002\u8be5\u5236\u9020\u65b9\u6cd5\u53ef\u4ee5\u9009\u62e9\u6027\u5730\u5e94\u7528\u4e8e\u5728\u5355\u4e00\u5806\u6808\u4e2d\u521b\u5efanMOS\u548cpMOS\u6676\u4f53\u7ba1\uff0c\u4ece\u800c\u589e\u52a0\u6676\u4f53\u7ba1\u5bc6\u5ea6\u5e76\u7b80\u5316\u6805\u6781\u5e03\u5c40\u3002\u6b64\u5916\uff0c\u8be5\u4e13\u5229\u6240\u63ed\u793a\u7684\u5236\u9020\u65b9\u6cd5\u5141\u8bb8\u9ad8\u6027\u80fd\u7845\u5948\u7c73\u5e26nMOS\u548c\u7845\u9517\u5948\u7c73\u5e26pMOS\u6676\u4f53\u7ba1\u7684\u5668\u4ef6\u6574\u5408\u3002\u5236\u9020\u65b9\u6cd5\u4e0e\u5f53\u524d\u534a\u5bfc\u4f53\u5236\u9020\u76f8\u517c\u5bb9\uff0c\u5728\u4e0d\u964d\u4f4enMOS\u6676\u4f53\u7ba1\u6027\u80fd\u7684\u60c5\u51b5\u4e0b\u63d0\u5347\u6027\u80fd\u3002\u8be5\u4e13\u5229\u6240\u63ed\u9732\u7684\u5236\u9020\u65b9\u6cd5\u4ea6\u53ef\u8c03\u6574\u4e3a\u9009\u62e9\u6027\u53bb\u9664\u90e8\u5206\u7684\u5948\u7c73\u5e26\uff0c\u901a\u8fc7\u8c03\u6574\u5806\u6808\u4e2d\u6d3b\u6027\u5948\u7c73\u5e26\u7684\u6570\u91cf\u6765\u5fae\u8c03\u6676\u4f53\u7ba1\u7684\u9a71\u52a8\u7535\u6d41\u3002<\/p>\n

\u5e94\u53d8\u7845\u6280\u672f<\/span><\/p>\n

\u7f8e\u56fd\u4e13\u5229US2023031490A1\u63d0\u4f9b\u4e00\u79cd\u4f7f\u7528\u5e94\u53d8\u677e\u5f1b\u7684\u7845\/\u7845\u9517 (Si\/SiGe) \u53cc\u5c42\u4f5c\u4e3a\u5236\u9020\u5e94\u53d8\u4fe1\u9053\u6676\u4f53\u7ba1\uff08\u7279\u522b\u662f\u5948\u7c73\u7247\u73af\u7ed5\u6805\u6781\u573a\u6548\u5e94\u6676\u4f53\u7ba1\uff0c\u7b80\u79f0GAAFETs\uff09\u7684\u57fa\u7840[4]<\/a>\u3002\u8be5\u7845\/\u7845\u9517\u53cc\u5c42\u7cfb\u900f\u8fc7\u7edd\u7f18\u5c42\u4e0a\u8986\u7845(Silicon-On-Insulator, SOI)\u5236\u7a0b\uff0c\u5e76\u4f5c\u4e3a\u751f\u957f\u8d85\u6676\u683c(superlattices)\u7684\u57fa\u5e95\uff0c\u7528\u4e8e\u63d0\u9ad8p\u578b\u91d1\u5c5e\u6c27\u5316\u7269\u534a\u5bfc\u4f53(PMOS)\u548cn\u578b\u91d1\u5c5e\u6c27\u5316\u7269\u534a\u5bfc\u4f53(NMOS)\u7684\u6027\u80fd\u3002<\/p>\n

\u8be5\u4e13\u5229\u7684\u6280\u672f\u7279\u5f81\u5305\u62ec(1)\u5e94\u53d8\u677e\u5f1b\u7684Si\/SiGe\u53cc\u5c42\uff1a\u8be5\u5236\u7a0b\u9996\u5148\u5728\u7845\u57fa\u677f\u4e0a\u5f62\u6210\u6c9f\u69fd\uff0c\u7136\u540e\u7528\u5e94\u53d8SiGe\u5c42\u586b\u5145\uff0c\u5f62\u6210\u7531\u7845\u90e8\u5206\u548c\u5e94\u53d8\u677e\u5f1b\u7684\u7845\u9517\u90e8\u5206\u7ec4\u6210\u7684\u53cc\u5c42\u3002\u5728Si\/SiGe\u53cc\u5c42\u4e0a\u5f62\u6210\u4e00\u5c42\u9ecf\u6027\u6c27\u5316\u7269\u5c42\uff0c\u7136\u540e\u5c06\u5176\u7c98\u5408\u5230\u8f7d\u4f53\u6676\u5706\u4e0a\u3002SiGe\u5c42\u677e\u5f1b\u4ee5\u8fbe\u5230\u6240\u9700\u7684\u5e94\u53d8\u677e\u5f1b\uff0c\u4ece\u800c\u63d0\u9ad8\u6676\u4f53\u7ba1\u4fe1\u9053\u7684\u6027\u80fd\uff1b(2)\u8d85\u6676\u683c\u7684\u5f62\u6210\uff1a\u5728\u5e94\u53d8\u677e\u5f1b\u7684Si\/SiGe\u53cc\u5c42\u4e0a\u751f\u957f\u4e00\u4e2a\u8d85\u6676\u683c\uff0c\u7531\u4ea4\u66ff\u6392\u5217\u7684\u7845\u5c42\u548c\u7845\u9517\u5c42\u7ec4\u6210\u3002\u8fd9\u4e9b\u5c42\u5f62\u6210\u4e86\u6676\u4f53\u7ba1\u7684\u5948\u7c73\u7247\u901a\u9053\u3002\u5bf9\u4e8ePMOS\u8bbe\u5907\uff0c\u901a\u9053\u662f\u538b\u7f29\u5e94\u53d8\u7684\u7845\u9517\uff0c\u800c\u5bf9\u4e8eNMOS\u8bbe\u5907\uff0c\u901a\u9053\u662f\u5f20\u5e94\u53d8\u7684\u7845\u3002\u8fd9\u4e9b\u901a\u9053\u4e2d\u7684\u5e94\u53d8\u589e\u52a0\u4e86\u8f7d\u6d41\u5b50\u8fc1\u79fb\u7387\uff0c\u4ece\u800c\u63d0\u9ad8\u4e86\u6676\u4f53\u7ba1\u6027\u80fd\u3002<\/p>\n

\u9517 \u2013 \u7845\u5149\u611f\u6d4b\u88c5\u7f6e<\/span><\/p>\n

\u7f8e\u56fd\u4e13\u5229US9954016B2\u63d0\u4f9b\u4e00\u79cd\u56fe\u50cf\u611f\u6d4b\u6570\u7ec4[5]<\/a>\uff0c\u8be5\u56fe\u50cf\u611f\u6d4b\u6570\u7ec4\u6574\u5408\u4e86\u53ef\u89c1\u5149\u548c\u8fd1\u7ea2\u5916\u5149\u68c0\u6d4b\u7684\u5149\u7535\u4e8c\u6781\u7ba1\u3002\u5b83\u4f7f\u7528\u4e86\u4e00\u4e2a\u8f7d\u4f53\u57fa\u677f\uff0c\u5177\u6709\u4e24\u7ec4\u5149\u7535\u4e8c\u6781\u7ba1\uff1a\u7b2c\u4e00\u7ec4\u4f7f\u7528\u534a\u5bfc\u4f53\u5c42\u68c0\u6d4b\u53ef\u89c1\u6ce2\u957f\uff0c\u7b2c\u4e8c\u7ec4\u4f7f\u7528\u9517\u2013\u7845\uff08GeSi\uff09\u5c42\u68c0\u6d4b\u8fd1\u7ea2\u5916\u6ce2\u957f\uff0c\u4ece\u800c\u63d0\u9ad8\u4f20\u611f\u5668\u7684\u7075\u654f\u5ea6\u548c\u8303\u56f4\u3002<\/p>\n

\u8be5\u4e13\u5229\u7684\u56fe\u50cf\u611f\u6d4b\u6570\u7ec4\u5305\u62ec\u4e00\u4e2a\u8f7d\u4f53\u57fa\u677f\uff0c\u7b2c\u4e00\u7ec4\u5149\u7535\u4e8c\u6781\u7ba1\u7528\u4e8e\u53ef\u89c1\u5149\uff0c\u7b2c\u4e8c\u7ec4\u5149\u7535\u4e8c\u6781\u7ba1\u7528\u4e8e\u8fd1\u7ea2\u5916\u5149\u3002\u7b2c\u4e00\u7ec4\u5149\u7535\u4e8c\u6781\u7ba1\u5305\u542b\u5177\u6709\u534a\u5bfc\u4f53\u5c42\uff08\u5982\u7845\uff09\u7684\u5149\u7535\u4e8c\u6781\u7ba1\uff0c\u4ee5\u5438\u6536\u53ef\u89c1\u6ce2\u957f\u3002\u7b2c\u4e8c\u7ec4\u5149\u7535\u4e8c\u6781\u7ba1\u5305\u542b\u5177\u6709\u9517-\u7845\u533a\u57df\u7684\u5149\u7535\u4e8c\u6781\u7ba1\uff0c\u4ee5\u5438\u6536\u7ea2\u5916\u6216\u8fd1\u7ea2\u5916\u6ce2\u957f\u3002\u8fd9\u4e24\u7ec4\u5149\u7535\u4e8c\u6781\u7ba1\u6574\u5408\u5728\u4e00\u4e2a\u5171\u540c\u7684\u57fa\u677f\u4e0a\uff0c\u5e76\u6392\u5217\u6210\u4e8c\u7ef4\u6570\u7ec4\u3002\u6bcf\u4e2a\u5149\u7535\u4e8c\u6781\u7ba1\u914d\u5907\u6709\u6ce2\u957f\u6ee4\u6ce2\u5668\u548c\u900f\u955c\u7ec4\u4ef6\uff0c\u4ee5\u805a\u7126\u548c\u4f20\u8f93\u7279\u5b9a\u6ce2\u957f\u7684\u5149\u3002\u6b64\u5916\uff0c\u6bcf\u4e2a\u5149\u7535\u4e8c\u6781\u7ba1\u5177\u6709\u4e00\u4e2a\u8f7d\u4f53\u6536\u96c6\u533a\u548c\u8bfb\u51fa\u533a\u3002\u7b2c\u4e00\u5149\u7535\u4e8c\u6781\u7ba1\u7684\u8bfb\u51fa\u533a\u4e0e\u7531\u95f8\u4fe1\u53f7\u63a7\u5236\u7684\u8bfb\u51fa\u7535\u8def\u76f8\u8fde\u3002\u9517\u2013\u7845\u5149\u7535\u4e8c\u6781\u7ba1\u5177\u6709\u591a\u4e2a\u95f8\uff0c\u589e\u5f3a\u4e86\u5bf9\u8f7d\u6d41\u5b50\u6536\u96c6\u8fc7\u7a0b\u7684\u63a7\u5236\uff0c\u8fd9\u5bf9\u4e8e\u98de\u65f6\u6d4b\u8ddd(Time of flight, ToF)\u7cfb\u7edf\u7b49\u5e94\u7528\u76f8\u5f53\u91cd\u8981\u3002\u6b64\u5916\uff0c\u7b2c\u4e8c\u7ec4\u5149\u7535\u4e8c\u6781\u7ba1\u4f7f\u7528GeSi\u6750\u6599\u56e0\u5176\u5728\u8fd1\u7ea2\u5916\u5149\u5149\u8c31\u4e2d\u5177\u6709\u8f83\u9ad8\u7684\u5149\u5438\u6536\u6548\u7387\uff0c\u514b\u670d\u4e86\u7845\u5728\u8fd9\u4e9b\u6ce2\u957f\u4e0a\u7684\u9650\u5236\u3002\u5c06\u7845\u7528\u4e8e\u53ef\u89c1\u5149\uff0cGeSi\u7528\u4e8eNIR\uff0c\u4f7f\u4f20\u611f\u5668\u7684\u5de5\u4f5c\u6ce2\u957f\u8303\u56f4\u5ef6\u4f38\u5e76\u63d0\u9ad8\u4e86\u6574\u4f53\u7075\u654f\u5ea6\u548c\u901f\u5ea6\u3002\u5236\u9020\u8fc7\u7a0b\u5305\u62ec\u5728\u534a\u5bfc\u4f53\u63ba\u6742\u6676\u5706\u4e0a\u751f\u957f\u9517\u2013\u7845\u5c42\uff0c\u5b9a\u4e49\u50cf\u7d20\uff0c\u5e76\u901a\u8fc7\u4e92\u8fde\u5c42\u5c06\u8fd9\u4e9b\u50cf\u7d20\u4e0e\u8f7d\u4f53\u57fa\u677f\u6574\u5408\u3002<\/p>\n

\u9517\u7528\u4e8e\u5149\u611f\u6d4b\u88c5\u7f6e\uff0c\u7279\u522b\u662f\u6574\u5408\u7845\u548cGeSi\u5149\u7535\u4e8c\u6781\u7ba1\uff0c\u4f7f\u4f20\u611f\u5668\u80fd\u591f\u68c0\u6d4b\u66f4\u5e7f\u7684\u5149\u8c31\u8303\u56f4\uff0c\u4ece\u53ef\u89c1\u5149\u5230\u8fd1\u7ea2\u5916\u5149\u3002\u5176\u4e2d\uff0cGeSi\u589e\u5f3a\u4e86\u5149\u7535\u4e8c\u6781\u7ba1\u7684\u7075\u654f\u5ea6\u548c\u901f\u5ea6\uff0c\u7279\u522b\u662f\u5728\u8fd1\u7ea2\u5916\u5149\u6ce2\u957f\u4e0a\u3002\u6b64\u5916\uff0cGeSi\u5149\u7535\u4e8c\u6781\u7ba1\u63d0\u4f9b\u66f4\u9ad8\u7684\u5149\u5438\u6536\u6548\u7387\uff0c\u51cf\u5c11\u50cf\u7d20\u95f4\u4e32\u6270\uff0c\u5e76\u80fd\u591f\u7f29\u5c0f\u50cf\u7d20\u5c3a\u5bf8\uff0c\u4ece\u800c\u63d0\u9ad8\u4f20\u611f\u5668\u7684\u5206\u8fa8\u7387\u3002\u8be5\u4e13\u5229\u6280\u672f\u652f\u6301\u5404\u79cd\u5e94\u7528\uff0c\u5305\u62ec\u9ad8\u5206\u8fa8\u7387\u6210\u50cf\u3001TOF\u6d4b\u91cf\u548c\u589e\u5f3a\u73b0\u5b9e\uff0c\u63d0\u4f9b\u8be6\u7ec6\u7684\u76f8\u4f4d\u548c\u6df1\u5ea6\u4fe1\u606f\u3002<\/p>\n

<\/a>\u5907\u6ce8\uff1a<\/p>\n

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    \n
  1. US20240010513A1, Germanium extraction from electronic waste, Arizona Board of Regents of University of Arizona, patent application on 2023 July 3.<\/li>\n
  2. JP2022032523A, \u937a\u7684\u56de\u6536\u65b9\u6cd5 (\u30b2\u30eb\u30de\u30cb\u30a6\u30e0\u306e\u56de\u53ce\u65b9\u6cd5), \u4f4f\u53cb\u96fb\u6c17\u5de5\u696d\u682a\u5f0f\u4f1a\u793e, 2020\/08\/12.<\/li>\n
  3. US20210408285A1, Gate-all-around integrated circuit structures having germanium-doped nanoribbon channel structures(\u5177\u6709\u9517\u63ba\u6742\u7684\u5948\u7c73\u5e26\u4fe1\u9053\u7ed3\u6784\u7684\u73af\u7ed5\u5f0f\u6805\u6781\u96c6\u6210\u7535\u8def\u7ed3\u6784), Intel Corporation, patent application on 2020 June 26.<\/li>\n
  4. US2023031490A1, Strained nanosheets on silicon-on-insulator substrate(\u7edd\u7f18\u5c42\u4e0a\u8986\u7845\u4e0a\u7684\u5e94\u53d8\u5948\u7c73\u7247), TSMC, patent application on 2022 May 6.<\/li>\n
  5. US9954016B2, Germanium-Silicon Light Sensing Apparatus(\u9517-\u7845\u5149\u611f\u6d4b\u88c5\u7f6e), \u5149\u7a0b\u7814\u521b\u80a1\u4efd\u6709\u9650\u516c\u53f8, 2016\/08\/04.<\/li>\n<\/ol>\n<\/div>\n\n\n\n
    \n\n\n\n
    \n

    \u597d\u6d88\u606f\uff5e\u5317\u7f8e\u667a\u6743\u62a5\u6709\u5fae\u4fe1\u516c\u4f17\u53f7\u4e86\uff01<\/strong><\/span><\/p>\n

    \u300a\u5317\u7f8e\u667a\u6743\u62a5\u300b\u5185\u5bb9\u6db5\u76d6\u4e16\u754c\u5404\u56fd\u7684\u77e5\u8bc6\u4ea7\u6743\u65b0\u95fb\u3001\u91cd\u8981\u7684\u4fb5\u6743\u8bc9\u8bbc\u6848\u4f8b\u5206\u6790\u3001\u6cd5\u89c4\u89e3\u6790\uff0c\u4ee5\u53ca\u4ea7\u4e1a\u4e0e\u6280\u672f\u65b0\u77e5\u7b49\u7b49\u3002<\/p>\n

    \u7acb\u5373\u5173\u6ce8\u5317\u7f8e\u667a\u6743\u5fae\u4fe1\u516c\u4f17\u53f7\u2192 NAIP_IPServices<\/strong><\/p>\n

    \uff5e\u6b22\u8fce\u8bfb\u8005\u5206\u4eab\u4e0e\u8f6c\u53d1\uff5e<\/p>\n<\/td>\n

    		\"\"<\/span><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

     <\/p>\n

    \u3010\u672c\u6587\u53ea\u53cd\u6620\u4e13\u5bb6\u4f5c\u8005\u610f\u89c1\uff0c\u4e0d\u4ee3\u8868\u672c\u62a5\u7acb\u573a\u3002\u3011<\/strong><\/p>\n\n\n\n
    \n\n\n\n
    \"\"<\/td>\n<\/td>\n\n\n\n\n\n\n\n\n
    \u4f5c\u8005\uff1a<\/strong><\/td>\n\u82ae\u5609\u73ae<\/strong><\/td>\n<\/tr>\n
    \u73b0\u4efb\uff1a<\/strong><\/td>\n\u53f0\u6e7e\u4e2d\u6280\u793e\u80fd\u6e90\u66a8\u4ea7\u4e1a\u7814\u7a76\u4e2d\u5fc3\u4e3b\u4efb<\/td>\n<\/tr>\n
    \u5b66\u5386\uff1a<\/strong><\/td>\n\u53f0\u6e7e\u6e05\u534e\u5927\u5b66 \u5948\u7c73\u5de5\u7a0b\u4e0e\u5fae\u7cfb\u7edf\u7814\u7a76\u6240 \u535a\u58eb
    \n\u53f0\u6e7e\u4e2d\u539f\u5927\u5b66 \u8d22\u7ecf\u6cd5\u5f8b\u7814\u7a76\u6240 \u7855\u58eb
    \n\u53f0\u6e7e\u79d1\u6280\u5927\u5b66 \u6750\u6599\u79d1\u5b66\u4e0e\u5de5\u7a0b\u7814\u7a76\u6240 \u7855\u58eb<\/td>\n<\/tr>\n
    \u7ecf\u5386\uff1a<\/strong><\/td>\n\u53f0\u6e7e\u5de5\u7814\u9662\u6280\u672f\u79fb\u8f6c\u4e0e\u6cd5\u5f8b\u4e2d\u5fc3\u6267\u884c\u957f\u5ba4
    \n\u53f0\u6e7e\u5de5\u7814\u9662\u7535\u5b50\u4e0e\u5149\u7535\u7814\u7a76\u6240\u4e13\u5229\u526f\u4e3b\u59d4
    \n\u5149\u7535\u4ea7\u4e1a\u77e5\u8bc6\u4ea7\u6743\u7ecf\u7406<\/td>\n<\/tr>\n
    \u4e13\u957f\uff1a<\/strong><\/td>\n\u957f\u671f\u4ece\u4e8b\u4ea7\u4e1a\u7814\u7a76\u3001\u4e13\u5229\u77e5\u8bc6\u4ea7\u6743\u4e0e\u6295\u8d44\u8bc4\u4f30\u7b49\u5de5\u4f5c\uff0c\u4e13\u6ce8\u4e8e\u80fd\u6e90\u3001\u4ea7\u4e1a\u3001\u73af\u5883\u3001\u7ecf\u6d4e\u7b49\u8bae\u9898\u3002\u64c5\u957f\u521b\u65b0\u6280\u672f\u7b56\u7565\u5206\u6790\u3001\u79d1\u6280\u9884\u6d4b\u53ca\u8bc4\u4f30\u3001\u4e13\u5229\u5206\u6790\u4e0e\u5e03\u5c40\u3001\u4ea7\u4e1a\u5206\u6790\u3001\u77e5\u8bc6\u4ea7\u6743\u7ba1\u7406\u4e0e\u7ecf\u8425\u7b56\u7565\u3001\u4e13\u5229\u7684\u5546\u4e1a\u5316\u4e0e\u8d27\u5e01\u5316\u3002\u719f\u637b\u4ea7\u4e1a\u6280\u672f\u53d1\u5c55\u8d8b\u52bf\uff0c\u5e76\u5e38\u5728\u5404\u5a92\u4f53\u5e73\u53f0\u53d1\u8868\u6587\u7ae0\u3001\u5e94\u9080\u6f14\u8bb2\uff0c\u6210\u529f\u5f15\u9886\u6280\u672f\u524d\u77bb\u4e0e\u4ea7\u4e1a\u5173\u952e\u8bae\u9898\u3002<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

     <\/p>\n","protected":false},"excerpt":{"rendered":"

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